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LG Innotek, Aixtron SE collaborate to develop SiC epitaxial wafers

LG Innotek, Aixtron SE collaborate to develop SiC epitaxial wafers

By BizLED Bureau

Mar 11, 2016: Aixtron SE, the worldwide provider of deposition equipment to the semiconductor industry, announced that Korea’s leading electronics company, LG Innotek has selected an AIX G5 WW (Warm-Wall) reactor. The step has been taken for the development of silicon carbide (SiC) epitaxial wafers targeted at power devices for automotive and renewable energy applications. The system configured for 6×8-inch substrates was delivered Dec 2015.

LG Innotek, Aixtron SE collaborate to develop SiC epitaxial wafers

The equipment design aims at squeezing production costs to the minimum level while maintaining quality in production. The AIX G5 WW vapor phase epitaxy (VPE) system is based on Aixtron’s production-proven planetary reactor platform giving the largest batch capacity and highest throughput in the industry. LG Innotek is a global specialized materials and components manufacturer and an affiliate of LG Group.

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The head leader of the Korea’s WPM (World Premier Material) national project for SiC materials development lead by LG Innotek and VP of LG Innotek, Dr. Kang stated: “The company sees a rising demand for SiC-based systems from major automotive manufacturers. The long-term experience with Aixtron epitaxy systems with Aixtron’s G5 WW tool offers superb advantages like high throughput and the yield on 6-inch wafers. The company will try to pre-qualify SiC epitaxial wafer samples using Aixtron’s SiC application lab and appreciate the outstanding, dedicated SiC customer support package.”

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The industry has requirements for high-volume production of SiC-based power electronic devices and AIX G5 WW perfectly matches it. The team at Aixtron is dedicated to supporting LG Innotek for the quick installation and SiC process qualification of the system, stated VP, Power Electronics at Aixtron.

LG Innotek focuses onto the core material and components of the advanced technology-based industries including automotive, display, mobile, semiconductor, IoT, and LED. LG Innotek, established in 1970 is headquartered in Seoul.

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