Dec 21, 2016: Veeco Instruments Inc. announced that OSRAM Opto Semiconductors GmbH has completed an agreement naming Veeco as the supplier for Metal Organic Chemical Vapor Deposition (MOCVD) and Precision Surface Processing (PSP) systems needed for high-volume LED production in Kulim. As part of the agreement, OSRAM Opto Semiconductors has ordered multiple TurboDisc® EPIK700 Gallium Nitride (GaN) MOCVD, and WaferStorm 3306 PSP Wet Process systems.
Veeco’s production-proven TurboDisc and Uniform FlowFlange MOCVD technologies have enabled LED manufacturers to achieve an improved cost per wafer savings compared to previous MOCVD systems through enhanced wafer uniformity, reduced operating expenses and increased productivity. The WaferStorm PSP Wet Process System is a solvent-based platform that integrates Veeco’s proprietary ImmJET™ technology for improved yield, higher throughput, and lower chemical cost than conventional methods for metal lift-off and other back-end compound semiconductor processes.
“We are pleased that OSRAM Opto Semiconductors has selected Veeco as a partner in their Diamond initiative, a clear indication that Veeco’s LED manufacturing solutions are best-in-class at lowering manufacturing costs and driving high levels of productivity,” said William J. Miller, Ph.D., President at Veeco. “In addition to industry-leading MOCVD equipment, Veeco’s WaferStorm platform provides distinct advantages to the back-end wafer cleaning process. As we move forward with this exclusive multi-year partnership, we plan to support OSRAM’s impressive expansion plans with advanced Veeco technology and process expertise.”
Source: Veeco Instruments Inc